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ASTM F327-2008 用自动粒子监控器对气体排污测控系统和部件粒子污染物取样的规程

ASTM F327-2008 用自动粒子监控器对气体排污测控系统和部件粒子污染物取样的规程

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资料描述

【英文标准名称】: Standard Practice for Sampling Gas Blow Down Systems and Components for Particulate Contamination by Automatic Particle Monitor Method
【原文标准名称】: 用自动粒子监控器对气体排污测控系统和部件粒子污染物取样的规程
【标准号】: ASTM F327-2008
【标准状态】: 现行
【国别】: 美国
【发布日期】: 2008
【实施或试行日期】:
【发布单位】: 美国材料与试验协会(US-ASTM)
【起草单位】: E21.05
【标准类型】: (Practice)
【标准水平】: ()
【中文主题词】:
【英文主题词】: Aerospace particulate contamination; Blow down systems; Contamination--systems (materials/applications); Gas delivery/distribution systems; Particle counters/counting; Particulate contamination; Pressure testing--semiconductor applications; Sampling elect
【摘要】: 1.1 This practice describes how to connect, prepare, and sample pressurized gas systems (having up to 19.1-mm (0.75-in.) diameter lines) for particulate contamination by using an automatic monitor. 1.2 The values stated in MKS units are to be regarded as the standard. The values given in parentheses are for information only. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For hazard statements, see Section 5.
【中国标准分类号】: Z15
【国际标准分类号】: 71_040_40
【页数】: 2P.;A4
【正文语种】: 英语

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